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Tokyo Electron to Introduce Coater/Developer in imec-ASML EUV Lab | AEI
Tokyo Electron Limited will introduce its coater/developer to the imec-ASML joint high numerical aperture (NA) extreme ultraviolet lithography (EUV) research laboratory (high NA lab) in the Netherlands. The equipment will be integrated inline with ASML’s EXE:5000 next-generation high NA EUV lithography system with a 0.55 numerical aperture, which is scheduled to be put to operation
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Tokyo Electron to Introduce Coater/Developer in imec-ASML EUV Lab | AEI
Tokyo Electron Limited will introduce its coater/developer to the imec-ASML joint high numerical aperture (NA) extreme ultraviolet lithography (EUV) research laboratory (high NA lab) in the Netherlands. The equipment will be integrated inline with ASML’s EXE:5000 next-generation high NA EUV lithography system with a 0.55 numerical aperture, which is scheduled to be put to operation
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Tokyo Electron to Introduce Coater/Developer in imec-ASML EUV Lab | AEI
Tokyo Electron Limited will introduce its coater/developer to the imec-ASML joint high numerical aperture (NA) extreme ultraviolet lithography (EUV) research laboratory (high NA lab) in the Netherlands. The equipment will be integrated inline with ASML’s EXE:5000 next-generation high NA EUV lithography system with a 0.55 numerical aperture, which is scheduled to be put to operation
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- og:descriptionTokyo Electron Limited will introduce its coater/developer to the imec-ASML joint high numerical aperture (NA) extreme ultraviolet lithography (EUV) research laboratory (high NA lab) in the Netherlands. The equipment will be integrated inline with ASML’s EXE:5000 next-generation high NA EUV lithography system with a 0.55 numerical aperture, which is scheduled to be put to operation
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